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[IEEE SCS 2003 International Symposium on Signals Circuits and Systems Proceedings (Cat No 03EX720) IIT-02 - Taos, New Mexico, USA (2002.09.27-2002.09.27)] SCS 2003 International Symposium on Signals Circuits and Systems Proceedings (Cat No 03EX720) IIT-02 - High depth resolution characterization of the damage and annealing behaviour of ultra shallow As implants in Si

✍ Scribed by van den Berg, ; Armour, ; Werner, ; Whelan, ; Vandervorst, ; Clarysse, ; Collart, ; Goldberg, ; Bailey, ; Noakes,

Book ID: 111871553
Publisher: IEEE
Year: 2002
Weight: 349 KB
Volume: 0
Category: Article
ISBN-13: 9780780371552
DOI: 10.1109/iit.2002.1258076

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