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[IEEE SCS 2003 International Symposium on Signals Circuits and Systems Proceedings (Cat No 03EX720) IIT-02 - Taos, New Mexico, USA (2002.09.27-2002.09.27)] SCS 2003 International Symposium on Signals Circuits and Systems Proceedings (Cat No 03EX720) IIT-02 - Low energy implant throughput improvement by using the Arsenic dimer ion (As/sub 2//sup +/) on the Axcelis GSDIII/LED ion implanter

✍ Scribed by Kopalidis, ; Sohl, ; Freer, ; Arneen, ; Reece, ; Rathmell,

Book ID: 120160220
Publisher: IEEE
Year: 2002
Weight: 464 KB
Category: Article
ISBN-13: 9780780371552
DOI: 10.1109/IIT.2002.1257954

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