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[IEEE SCS 2003 International Symposium on Signals Circuits and Systems Proceedings (Cat No 03EX720) IIT-02 - Taos, New Mexico, USA (2002.09.27-2002.09.27)] SCS 2003 International Symposium on Signals Circuits and Systems Proceedings (Cat No 03EX720) IIT-02 - Arsenic dimer implants for shallow extension in 0.13/spl mu/m logic devices

✍ Scribed by Chang, ; Chang, ; Agarwal, ; Ameen, ; Reece, ; Chen, ; Chien, ; Tsai, ; Tsai, ; Weng, ; Wu, ; Yang,

Book ID: 120160219
Publisher: IEEE
Year: 2002
Weight: 371 KB
Category: Article
ISBN-13: 9780780371552
DOI: 10.1109/IIT.2002.1257951

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