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[IEEE Proceedings of the 34th European Solid-State Device Research Conference - Leuven, Belgium (21-23 Sept. 2004)] Proceedings of the 30th European Solid-State Circuits Conference (IEEE Cat. No.04EX850) - TCAD modelling of PLAD implantations and application to sub-65nm technological nodes [plasma doping]

✍ Scribed by Vet, L.; Robilliart, E.; Lenoble, D.; Grouillet, A.; Lallement, F.; Dray, A.; Salvetti, F.; Villanueva, D.; Balossier, E.; Jaouen, H.; Walther, S.; Jeong, U.; Mehta, S.

Book ID: 126666997
Publisher: IEEE
Year: 2004
Weight: 243 KB
Category: Article
ISBN-13: 9780780384781
DOI: 10.1109/ESSDER.2004.1356575

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