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[IEEE NUPAD IV. Workshop on Numerical Modeling of Processes and Devices for Integrated Circuits, - Seattle, WA (May 31-June 1, 1992)] NUPAD IV. Workshop on Numerical Modeling of Processes and Devices for Integrated Circuits, - An Efficient Loop Detection and Removal Algorithm for 3D Surface-Based Lithography Simulation

✍ Scribed by Helmsen, J.J.; Scheckler, E.W.; Neureuther, A.R.; Sequin, C.H.

Book ID: 126631129
Publisher: IEEE
Year: 1992
Weight: 408 KB
Category: Article
ISBN-13: 9780780305168
DOI: 10.1109/NUPAD.1992.673838

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