𝔖 Bobbio Scriptorium

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[IEEE Micro Electro Mechanical Systems, An Investigation of Micro Structures, Sensors, Actuators, Machines and Robots. - Napa Valley, CA, USA (11-14 Feb. 1990)] IEEE Proceedings on Micro Electro Mechanical Systems, An Investigation of Micro Structures, Sensors, Actuators, Machines and Robots. - Mechanical integrity of polysilicon films exposed to hydrofluoric acid solutions

✍ Scribed by Walker, J.A.; Gabriel, K.J.; Mehregany, M.

Book ID: 126620397
Publisher: IEEE
Year: 1990
Weight: 448 KB
Category: Article
DOI: 10.1109/MEMSYS.1990.110248

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