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[IEEE International Solid State Sensors and Actuators Conference (Transducers '97) - Chicago, IL, USA (16-19 June 1997)] Proceedings of International Solid State Sensors and Actuators Conference (Transducers '97) - A surface micromachined latching accelerometer

✍ Scribed by Xi-Qing Sun, ; Shifang Zhou, ; Carr, W.N.

Book ID: 127196332
Publisher: IEEE
Year: 1997
Weight: 378 KB
Volume: 2
Category: Article
ISBN-13: 9780780338296
DOI: 10.1109/sensor.1997.635418

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