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[IEEE International Solid State Sensors and Actuators Conference (Transducers '97) - Chicago, IL, USA (16-19 June 1997)] Proceedings of International Solid State Sensors and Actuators Conference (Transducers '97) - Characterization of a high-sensitivity micromachined tunneling accelerometer

✍ Scribed by Liu, C.H.; Grade, J.D.; Barzilai, A.M.; Reynolds, J.K.; Partridge, A.; Rockstad, H.K.; Kenny, T.W.

Book ID: 121651028
Publisher: IEEE
Year: 1997
Weight: 273 KB
Volume: 1
Category: Article
ISBN-13: 9780780338296
DOI: 10.1109/SENSOR.1997.613688

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