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[IEEE International Solid State Sensors and Actuators Conference (Transducers '97) - Chicago, IL, USA (16-19 June 1997)] Proceedings of International Solid State Sensors and Actuators Conference (Transducers '97) - Nonlinear electromechanical behaviour of an electrostatic microrelay

✍ Scribed by Gretillat, M.-A.; Yang, Y.-J.; Hung, E.S.; Rabinovich, V.; Ananthasuresh, G.K.; De Rooij, N.F.; Senturia, S.D.

Book ID: 126732270
Publisher: IEEE
Year: 1997
Weight: 570 KB
Volume: 2
Category: Article
ISBN-13: 9780780338296
DOI: 10.1109/SENSOR.1997.635406

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