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[IEEE International Solid State Sensors and Actuators Conference (Transducers '97) - Chicago, IL, USA (16-19 June 1997)] Proceedings of International Solid State Sensors and Actuators Conference (Transducers '97) - A 3-axis force balanced accelerometer using a single proof-mass

✍ Scribed by Lemkin, M.A.; Boser, B.E.; Auslander, D.; Smith, J.H.

Book ID: 121667943
Publisher: IEEE
Year: 1997
Weight: 584 KB
Volume: 2
Category: Article
ISBN-13: 9780780338296
DOI: 10.1109/SENSOR.1997.635417

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