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[IEEE International Electron Devices Meeting. Technical Digest. IEDM - San Francisco, CA, USA (10-13 Dec. 2000)] International Electron Devices Meeting 2000. Technical Digest. IEDM (Cat. No.00CH37138) - 50 nm Vertical Replacement-Gate (VRG) pMOSFETs

✍ Scribed by Sang-Hyun Oh, ; Hergenrother, J.M.; Nigam, T.; Monroe, D.; Klemens, F.P.; Kornblit, A.; Mansfield, W.M.; Baker, M.R.; Barr, D.L.; Baumann, F.H.; Bolan, K.J.; Boone, T.; Ciampa, N.A.; Cirelli, R.A.; Eaglesham, D.J.; Ferry, E.J.; Fiory, A.T.; Frackoviak, J.; Garno, J.P.; Gossmann, H.J.; Grazul, J.L.; Green, M.L.; Hillenius, S.J.; Johnson, R.W.; Keller, R.C.; King, C.A.; Kleiman, R.N.; Lee, J.T.-C.; Miner, J.F.; Morris, M.D.; Rafferty, C.S.; Rosamilia, J.M.; Short, K.; Sorsch, T.W.; Timko, A.G.; Weber, G.R.; Wilk, G.D.; Plummer, J.D.

Book ID: 126594709
Publisher: IEEE
Year: 2000
Weight: 558 KB
Edition: 2000
Category: Article
ISBN-13: 9780780364387
DOI: 10.1109/IEDM.2000.904260

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