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[IEEE International Electron Devices Meeting. Technical Digest. IEDM - San Francisco, CA, USA (10-13 Dec. 2000)] International Electron Devices Meeting 2000. Technical Digest. IEDM (Cat. No.00CH37138) - Laser thermal annealed SSR well prior to epi-channel growth (LASPE) for 70 nm nFETS

✍ Scribed by Jung-Ho Lee, ; Jeongyoub Lee, ; Somit Talwar, ; Yun Wang, ; Daehee Weon, ; Seungho Hahn, ; Changyong Kang, ; Taeeun Hong, ; Younggwan Kim, ; Haewang Lee, ; Seokkiu Lee, ; Jaesung Roh, ; Daegwan Kang, ; Jinwon Park,

Book ID: 115543924
Publisher: IEEE
Year: 2000
Weight: 393 KB
Edition: 2000
Volume: 0
Category: Article
ISBN-13: 9780780364387
DOI: 10.1109/iedm.2000.904351

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