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[IEEE IEEE 1998 International Interconnect Technology Conference - San Francisco, CA, USA (1-3 June 1998)] Proceedings of the IEEE 1998 International Interconnect Technology Conference (Cat. No.98EX102) - CVD copper metal for poly-Si thin film transistor

✍ Scribed by He, S.; Nguyen, T.

Book ID: 126600553
Publisher: IEEE
Year: 1998
Weight: 339 KB
Category: Article
ISBN-13: 9780780342859
DOI: 10.1109/IITC.1998.704930

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