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[IEEE ESSDERC 2013 - 43rd European Solid State Device Research Conference - Bucharest, Romania (2013.09.16-2013.09.20)] 2013 Proceedings of the European Solid-State Device Research Conference (ESSDERC) - Effect of ions presence in the SiOCH inter metal dielectric structure

✍ Scribed by Rebuffat, B.; Della Marca, V.; Masson, P.; Ogier, J.-L.; Mantelli, M.; Paulet, O.; Lopez, L.; Laffont, R.

Book ID: 126753936
Publisher: IEEE
Year: 2013
Weight: 535 KB
Category: Article
ISBN: 1479906492
DOI: 10.1109/ESSDERC.2013.6818858

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