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[IEEE Digest of Technical Papers. 2004 Symposium on VLSI Technology, 2004. - Honolulu, HI, USA (2004.06.17-2004.06.17)] Digest of Technical Papers. 2004 Symposium on VLSI Technology, 2004. - B/sub 2/H/sub 6/ plasma doping with "in-situ He pre-amorphization"

✍ Scribed by Sasaki, Y.; Jin, C.G.; Tamura, H.; Mizuno, B.; Higaki, R.; Satoh, T.; Majima, K.; Sauddin, H.; Takagi, K.; Ohmi, S.; Tsutsui, K.; Iwai, H.

Book ID: 126751682
Publisher: IEEE
Year: 2004
Weight: 182 KB
Category: Article
ISBN-13: 9780780382893
DOI: 10.1109/VLSIT.2004.1345466

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