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[IEEE Digest of Technical Papers. 2004 Symposium on VLSI Technology, 2004. - Honolulu, HI, USA (2004.06.17-2004.06.17)] Digest of Technical Papers. 2004 Symposium on VLSI Technology, 2004. - Effects of barrier height (/spl Phi//sub B/) and the nature of bi-layer structure on the reliability of high-k dielectrics with dual metal gate (Ru & Ru-Ta alloy) technology

โœ Scribed by Kim, Y.H.; Choi, R.; Jha, R.; Lee, J.H.; Misra, V.; Lee, J.C.


Book ID
121800843
Publisher
IEEE
Year
2004
Weight
195 KB
Category
Article
ISBN-13
9780780382893

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