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[IEEE 2013 IEEE 26th International Conference on Micro Electro Mechanical Systems (MEMS) - Taipei, Taiwan (2013.01.20-2013.01.24)] 2013 IEEE 26th International Conference on Micro Electro Mechanical Systems (MEMS) - Crystallographic and eigenmode dependence of TCf for single crystal silicon contour mode resonators

✍ Scribed by Zhu, H.; Shan, G. C.; Tu, C.; Lee, J. E.-Y.

Book ID: 121210519
Publisher: IEEE
Year: 2013
Weight: 547 KB
Category: Article
ISBN: 1467356549
DOI: 10.1109/MEMSYS.2013.6474354

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