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[IEEE 2013 IEEE 26th International Conference on Micro Electro Mechanical Systems (MEMS) - Taipei, Taiwan (2013.01.20-2013.01.24)] 2013 IEEE 26th International Conference on Micro Electro Mechanical Systems (MEMS) - Piezoelectrically transduced high-Q silica micro resonators

✍ Scribed by Wu, Zhengzheng; Peczalski, Adam; Thakar, Vikram A.; Cao, Zongliang; Yuan, Yi; He, Guohong; Peterson, Rebecca L.; Najafi, Khalil; Rais-Zadeh, Mina

Book ID: 121204919
Publisher: IEEE
Year: 2013
Weight: 432 KB
Category: Article
ISBN: 1467356549
DOI: 10.1109/MEMSYS.2013.6474192

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