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[IEEE 2013 IEEE 26th International Conference on Micro Electro Mechanical Systems (MEMS) - Taipei, Taiwan (2013.01.20-2013.01.24)] 2013 IEEE 26th International Conference on Micro Electro Mechanical Systems (MEMS) - An on-chip opto-mechanical accelerometer

✍ Scribed by Dong, B.; Cai, H.; Tsai, J. M.; Kwong, D. L.; Liu, A. Q.

Book ID: 120564823
Publisher: IEEE
Year: 2013
Weight: 791 KB
Category: Article
ISBN: 1467356549
DOI: 10.1109/MEMSYS.2013.6474323

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