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[IEEE 2013 IEEE 26th International Conference on Micro Electro Mechanical Systems (MEMS) - Taipei, Taiwan (2013.01.20-2013.01.24)] 2013 IEEE 26th International Conference on Micro Electro Mechanical Systems (MEMS) - Fabrication and testing of hemispherical MEMS wineglass resonators

✍ Scribed by Pai, Pradeep; Chowdhury, Faisal K.; Pourzand, Hoorad; Tabib-Azar, Massood

Book ID: 121210507
Publisher: IEEE
Year: 2013
Weight: 563 KB
Category: Article
ISBN: 1467356549
DOI: 10.1109/MEMSYS.2013.6474333

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