𝔖 Bobbio Scriptorium

✦ LIBER ✦

[IEEE 2013 24th Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC 2013) - Saratoga Springs, NY (2013.5.14-2013.5.16)] ASMC 2013 SEMI Advanced Semiconductor Manufacturing Conference - Lean manufacturing improvements supercharging direct observation with ethnography

✍ Scribed by Giessler, Matthias; Fagan, Gerry; Jaggers, Dan

Book ID: 126659853
Publisher: IEEE
Year: 2013
Weight: 729 KB
Category: Article
ISBN: 1467350060
DOI: 10.1109/ASMC.2013.6552773

No coin nor oath required. For personal study only.

📜 SIMILAR VOLUMES

[IEEE 2013 24th Annual SEMI Advanced Sem

[IEEE 2013 24th Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC 2013) - Saratoga Springs, NY (2013.5.14-2013.5.16)] ASMC 2013 SEMI Advanced Semiconductor Manufacturing Conference - Challenges in thin wafer handling and processing

✍ Olson, Stephen; Hummler, Klaus; Sapp, Brian 📂 Article 📅 2013 🏛 IEEE ⚖ 373 KB

[IEEE 2013 24th Annual SEMI Advanced Sem

[IEEE 2013 24th Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC 2013) - Saratoga Springs, NY (2013.5.14-2013.5.16)] ASMC 2013 SEMI Advanced Semiconductor Manufacturing Conference - Composition measurement of tri-layer SiGe stack using broadband spectroscopic ellipsometry

✍ Haensel, Leander; Ygartua, Carlos; Shu, Frank; Haupt, Ronny; Anderson, Michael; 📂 Article 📅 2013 🏛 IEEE ⚖ 355 KB

[IEEE 2013 24th Annual SEMI Advanced Sem

[IEEE 2013 24th Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC 2013) - Saratoga Springs, NY (2013.5.14-2013.5.16)] ASMC 2013 SEMI Advanced Semiconductor Manufacturing Conference - An effective problem decomposition method for scheduling of diffusion processes based on mixed integer linear programming

✍ Chihyun Jung, ; Pabst, Detlef; Myoungsoo Ham, ; Stehli, Marcel; Rothe, Marcel 📂 Article 📅 2013 🏛 IEEE ⚖ 344 KB

[IEEE 2013 24th Annual SEMI Advanced Sem

[IEEE 2013 24th Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC 2013) - Saratoga Springs, NY (2013.5.14-2013.5.16)] ASMC 2013 SEMI Advanced Semiconductor Manufacturing Conference - On the generation and elimination of lonely poly-silicon crater-defects and their impacts on gate oxide integrity (GOI) in dual-gate technology

✍ Lieyi Sheng, ; Porath, Paul; Glines, Eddie 📂 Article 📅 2013 🏛 IEEE ⚖ 924 KB

[IEEE 2012 23rd Annual SEMI Advanced Sem

[IEEE 2012 23rd Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC) - Saratoga Springs, NY (2012.05.15-2012.05.17)] 2012 SEMI Advanced Semiconductor Manufacturing Conference - Detecting arcing events in semiconductor manufacturing equipment

✍ Singlevich, S.; Subrahmanyam, K. V. R. 📂 Article 📅 2012 🏛 IEEE ⚖ 351 KB

[IEEE 2012 23rd Annual SEMI Advanced Sem

[IEEE 2012 23rd Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC) - Saratoga Springs, NY (2012.05.15-2012.05.17)] 2012 SEMI Advanced Semiconductor Manufacturing Conference - Rules of automation for 200mm semiconductor manufacturing environment

✍ Heinrich, H.; Deutschlander, A. 📂 Article 📅 2012 🏛 IEEE ⚖ 778 KB