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[IEEE 2013 24th Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC 2013) - Saratoga Springs, NY (2013.5.14-2013.5.16)] ASMC 2013 SEMI Advanced Semiconductor Manufacturing Conference - Composition measurement of tri-layer SiGe stack using broadband spectroscopic ellipsometry

✍ Scribed by Haensel, Leander; Ygartua, Carlos; Shu, Frank; Haupt, Ronny; Anderson, Michael; Birk, Felipe Tijiwa; Vaid, Alok

Book ID: 124154507
Publisher: IEEE
Year: 2013
Weight: 355 KB
Category: Article
ISBN: 1467350060
DOI: 10.1109/ASMC.2013.6552810

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