✦ LIBER ✦
[IEEE 2013 24th Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC 2013) - Saratoga Springs, NY (2013.5.14-2013.5.16)] ASMC 2013 SEMI Advanced Semiconductor Manufacturing Conference - An effective problem decomposition method for scheduling of diffusion processes based on mixed integer linear programming
✍ Scribed by Chihyun Jung, ; Pabst, Detlef; Myoungsoo Ham, ; Stehli, Marcel; Rothe, Marcel
- Book ID
- 121352216
- Publisher
- IEEE
- Year
- 2013
- Weight
- 344 KB
- Category
- Article
- ISBN
- 1467350060
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