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[IEEE 2012 IEEE International Meeting for Future of Electron Devices, Kansai (IMFEDK) - Suita, Japan (2012.05.9-2012.05.11)] 2012 IEEE International Meeting for Future of Electron Devices, Kansai - Crystallization mechanism of thick a-Si0.5Ge0.5 film by excimer laser annealing

✍ Scribed by Kino, Shota; Nonomura, Yuki; Heya, Akira; Matsuo, Naoto; Kanda, Kazuhiro; Miyamoto, Shuji; Amano, Sho; Mochizuki, Takayasu; Toko, Kaoru; Sadoh, Taizoh; Miyao, Masanobu

Book ID: 118028277
Publisher: IEEE
Year: 2012
Weight: 161 KB
Category: Article
ISBN: 1467308374
DOI: 10.1109/imfedk.2012.6218600

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