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[IEEE 2012 IEEE International Interconnect Technology Conference - IITC - San Jose, CA, USA (2012.06.4-2012.06.6)] 2012 IEEE International Interconnect Technology Conference - How to address metallization and reliability challenges in today and tomorrows technology nodes?

✍ Scribed by Preusse, Axel; Hahn, Jens; Chowdhury, Tamjid; Hintze, Bernd; Liske, Romy; Nopper, Markus; Stoeckgen, Uwe

Book ID: 115535016
Publisher: IEEE
Year: 2012
Weight: 86 KB
Category: Article
ISBN: 1467311367
DOI: 10.1109/iitc.2012.6251655

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