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[IEEE 2012 IEEE International Conference on Microelectronic Test Structures (ICMTS) - San Diego, CA, USA (2012.03.19-2012.03.22)] 2012 IEEE International Conference on Microelectronic Test Structures - A diaphragm based piezoelectric AlN film quality test structure

✍ Scribed by Jackson, Nathan; O'Keeffe, Rosemary; O'Leary, Robert; O'Neill, Mike; Waldron, Finbarr; Mathewson, Alan

Book ID: 120051676
Publisher: IEEE
Year: 2012
Weight: 795 KB
Category: Article
ISBN: 1467310298
DOI: 10.1109/ICMTS.2012.6190612

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