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[IEEE 2012 IEEE 25th International Conference on Micro Electro Mechanical Systems (MEMS) - Paris, France (2012.01.29-2012.02.2)] 2012 IEEE 25th International Conference on Micro Electro Mechanical Systems (MEMS) - Fabrication of narrow comb-shaped electret by removing charge using excimer laser beam from charge-implanted CYTOP film for avoiding electrostatic repulsion problem

✍ Scribed by Suzuki, M.; Wada, T.; Takahashi, T.; Matsushita, T.; Onishi, J.; Nishida, T.; Yoshikawa, Y.; Aoyagi, S.

Book ID: 121287754
Publisher: IEEE
Year: 2012
Weight: 874 KB
Category: Article
ISBN: 1467303240
DOI: 10.1109/MEMSYS.2012.6170411

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