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[IEEE 2012 IEEE 25th International Conference on Micro Electro Mechanical Systems (MEMS) - Paris, France (2012.01.29-2012.02.2)] 2012 IEEE 25th International Conference on Micro Electro Mechanical Systems (MEMS) - Micro-fluidic resonator

✍ Scribed by Pigot, Ch.; Hibara, A.

Book ID: 121283020
Publisher: IEEE
Year: 2012
Weight: 1019 KB
Category: Article
ISBN: 1467303240
DOI: 10.1109/MEMSYS.2012.6170319

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