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[IEEE 2012 IEEE 25th International Conference on Micro Electro Mechanical Systems (MEMS) - Paris, France (2012.01.29-2012.02.2)] 2012 IEEE 25th International Conference on Micro Electro Mechanical Systems (MEMS) - Multi-functional integrated sensors for the environment

✍ Scribed by Roozeboom, C. L.; Sim, J. Y.; Wickeraad, D.; Dura, B.; Smith, W. S.; Hopcroft, M. A.; Hartwell, P. G.; Williams, R. S.; Pruitt, B. L.

Book ID: 121258489
Publisher: IEEE
Year: 2012
Weight: 844 KB
Category: Article
ISBN: 1467303240
DOI: 10.1109/MEMSYS.2012.6170114

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