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[IEEE 2012 IEEE 25th International Conference on Micro Electro Mechanical Systems (MEMS) - Paris, France (2012.01.29-2012.02.2)] 2012 IEEE 25th International Conference on Micro Electro Mechanical Systems (MEMS) - CMOS-based force sensor with overload protection and improved assembly tolerance

✍ Scribed by Baumann, M.; Peter, A.; Moser, D.; Ruther, P.; Paul, O.

Book ID: 121268949
Publisher: IEEE
Year: 2012
Weight: 887 KB
Category: Article
ISBN: 1467303240
DOI: 10.1109/MEMSYS.2012.6170234

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