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[IEEE 2012 IEEE 25th International Conference on Micro Electro Mechanical Systems (MEMS) - Paris, France (2012.01.29-2012.02.2)] 2012 IEEE 25th International Conference on Micro Electro Mechanical Systems (MEMS) - Self-aligned fabrication process for active membrane made of photosensitive nanocomposite

✍ Scribed by Nakahara, Tasuku; Hosokawa, Yuuki; Terao, Kyohei; Takao, Hidekuni; Shimokawa, Fusao; Oohira, Fumikazu; Namazu, Takahiro; Kotera, Hidetoshi; Suzuki, Takaaki

Book ID: 121287752
Publisher: IEEE
Year: 2012
Weight: 944 KB
Category: Article
ISBN: 1467303240
DOI: 10.1109/MEMSYS.2012.6170374

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