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[IEEE 2011 International Conference on Microelectronic Test Structures (ICMTS) - Amsterdam, Netherlands (2011.04.4-2011.04.7)] 2011 IEEE ICMTS International Conference on Microelectronic Test Structures - New test structure for evaluating low-k dielectric interconnect layers by using ring-oscillators and metal comb/serpentine patterns

✍ Scribed by Tamaki, Yoichi; Ito, Masaki; Takimoto, Yoshio; Hashino, Masaru; Kawamoto, Yoshifumi

Book ID: 118008198
Publisher: IEEE
Year: 2011
Weight: 351 KB
Volume: 0
Category: Article
ISBN: 1424485266
DOI: 10.1109/icmts.2011.5976873

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