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[IEEE 2011 International Conference on Microelectronic Test Structures (ICMTS) - Amsterdam, Netherlands (2011.04.4-2011.04.7)] 2011 IEEE ICMTS International Conference on Microelectronic Test Structures - An efficient array structure to characterize the impact of through silicon vias on FET devices

✍ Scribed by Perry, Dan; Cho, Jonghoon; Domae, Shinichi; Asimakopoulos, Panagiotis; Yakovlev, Alex; Marchal, Pol; Van der Plas, Geert; Minas, Nikolaos

Book ID: 118008197
Publisher: IEEE
Year: 2011
Weight: 532 KB
Volume: 0
Category: Article
ISBN: 1424485266
DOI: 10.1109/icmts.2011.5976872

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