[IEEE 2009 17th International Conference on Advanced Thermal Processing of Semiconductors (RTP) - Albany, NY, USA (2009.09.29-2009.10.2)] 2009 17th International Conference on Advanced Thermal Processing of Semiconductors - Monitoring of local and global temperature non-uniformities by means of Therma-Probe and Micro Four-Point Probe metrology

✍ Scribed by Rosseel, Erik; Petersen, Dirch H.; Osterberg, Frederik W.; Hansen, Ole; Bogdanowicz, Janusz; Clarysse, Trudo; Vandervorst, Wilfried; Ortolland, Claude; Hoffmann, Thomas; Chan, Philip; Salnik, Alex; Nicolaides, Lena

• Book ID: 126678416
• Publisher: IEEE
• Year: 2009
• Weight: 920 KB
• Category: Article
• ISBN: 1424438144
• DOI: 10.1109/RTP.2009.5373457