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[IEEE 2009 17th International Conference on Advanced Thermal Processing of Semiconductors (RTP) - Albany, NY, USA (2009.09.29-2009.10.2)] 2009 17th International Conference on Advanced Thermal Processing of Semiconductors - Accurate micro Hall Effect measurements on scribe line pads

✍ Scribed by Osterberg, F. W.; Petersen, D.H.; Wang, F.; Rosseel, E.; Vandervorst, W.; Hansen, O.

Book ID: 126670053
Publisher: IEEE
Year: 2009
Weight: 425 KB
Category: Article
ISBN: 1424438144
DOI: 10.1109/RTP.2009.5373450

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