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[IEEE 2009 17th International Conference on Advanced Thermal Processing of Semiconductors (RTP) - Albany, NY, USA (2009.09.29-2009.10.2)] 2009 17th International Conference on Advanced Thermal Processing of Semiconductors - Millisecond annealing of high-performance SiGe HBTs

✍ Scribed by Bolze, D.; Heinemann, B.; Gelpey, J.; McCoy, S.; Lerch, W.

Book ID: 118258308
Publisher: IEEE
Year: 2009
Weight: 419 KB
Volume: 0
Category: Article
ISBN: 1424438144
DOI: 10.1109/rtp.2009.5373483

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