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[IEEE 2005 International Conference on MEMS,NANO and Smart Systems - Banff, AB, Canada (24-27 July 2005)] 2005 International Conference on MEMS,NANO and Smart Systems - A New Method of Electrostatic Force Modeling for MEMS Sensors and Actuators

✍ Scribed by Chowdhury, S.; Ahmadi, M.; Miller, W.C.

Book ID: 120057451
Publisher: IEEE
Year: 2005
Weight: 296 KB
Category: Article
ISBN-13: 9780769523989
DOI: 10.1109/ICMENS.2005.16

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