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[IEEE 2005 International Conference on MEMS,NANO and Smart Systems - Banff, AB, Canada (24-27 July 2005)] 2005 International Conference on MEMS,NANO and Smart Systems - Dynamic Deflection of Electrostatic MEMS

✍ Scribed by Ghoussoub, N.; Yujin Guo,

Book ID: 115508731
Publisher: IEEE
Year: 2005
Weight: 212 KB
Volume: 0
Category: Article
ISBN-13: 9780769523989
DOI: 10.1109/icmens.2005.43

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