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[IEEE 2005 International Conference on MEMS,NANO and Smart Systems - Banff, AB, Canada (24-27 July 2005)] 2005 International Conference on MEMS,NANO and Smart Systems - Nonlinear Vibration of Electrostatic MEMS under DC and AC Applied Voltage

✍ Scribed by Takamatsu, H.; Sugiura, T.

Book ID: 121717004
Publisher: IEEE
Year: 2005
Weight: 168 KB
Category: Article
ISBN-13: 9780769523989
DOI: 10.1109/icmens.2005.89

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