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[IEEE 2005 International Conference on MEMS,NANO and Smart Systems - Banff, AB, Canada (24-27 July 2005)] 2005 International Conference on MEMS,NANO and Smart Systems - Optical MEMS pressure sensor using ring resonator on a circular diaphragm

✍ Scribed by Pattnaik, P.K.; Vijayaaditya, Bh.; Srinivas, T.; Selvarajan, A.

Book ID: 120299634
Publisher: IEEE
Year: 2005
Weight: 176 KB
Category: Article
ISBN-13: 9780769523989
DOI: 10.1109/ICMENS.2005.94

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