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[IEEE 2002 Symposium on VLSI Technology Digest of Technical Papers - Honolulu, HI, USA (11-13 June 2002)] 2002 Symposium on VLSI Technology. Digest of Technical Papers (Cat. No.01CH37303) - Integration of capacitor for sub-100-nm DRAM trench technology

✍ Scribed by Lutzen, J.; Birner, A.; Goldbach, M.; Gutsche, M.; Hecht, T.; Jakschik, S.; Orth, A.; Sanger, A.; Schroder, U.; Seidl, H.; Sell, B.; Schumann, D.

Book ID: 124156504
Publisher: IEEE
Year: 2002
Weight: 310 KB
Category: Article
ISBN-13: 9780780373129
DOI: 10.1109/VLSIT.2002.1015442

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