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[IEEE 2001 International Semiconductor Device Research Symposium. Symposium - Washington, DC, USA (5-7 Dec. 2001)] 2001 International Semiconductor Device Research Symposium. Symposium Proceedings (Cat. No.01EX497) - Preparation of phosphorous doping to beta-iron disilicide thin films and application for devices

✍ Scribed by Ehara, T.; Nakagomi, S.; Kokubun, Y.

Book ID: 126671473
Publisher: IEEE
Year: 2001
Weight: 132 KB
Category: Article
ISBN-13: 9780780374324
DOI: 10.1109/ISDRS.2001.984444

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