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[IEEE 2001 International Semiconductor Device Research Symposium. Symposium - Washington, DC, USA (5-7 Dec. 2001)] 2001 International Semiconductor Device Research Symposium. Symposium Proceedings (Cat. No.01EX497) - MEMS-based gray-scale lithography

✍ Scribed by Waits, C.M.; Ghodssi, R.; Ervin, M.H.; Dubey, M.

Book ID: 125456461
Publisher: IEEE
Year: 2001
Tongue: English
Weight: 446 KB
Category: Article
ISBN-13: 9780780374324
DOI: 10.1109/isdrs.2001.984470

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