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[IEEE 1994 IEEE International Electron Devices Meeting - San Francisco, CA, USA (11-14 Dec. 1994)] Proceedings of 1994 IEEE International Electron Devices Meeting - Dual polycide gate and dual buried contact technologies achieving a 0.4 μm nMOS/pMOS spacing for a 7.65 μm/sup 2/ full-CMOS SRAM cell

✍ Scribed by Koike, H.; Unno, Y.; Ishimaru, K.; Matsuoka, F.; Kakumu, M.


Book ID
126599785
Publisher
IEEE
Year
1994
Weight
320 KB
Category
Article
ISBN-13
9780780321113

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