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[IEEE 1992 Symposium on VLSI Technology Digest of Technical Papers - Seattle, WA, USA (2-4 June 1992)] 1992 Symposium on VLSI Technology Digest of Technical Papers - A 0.72 mu m/sup 2/ recessed STC (RSTC) technology for 256 Mbit DRAMs using quarter-micron phase-shift lithography

✍ Scribed by Sagara, K.; Kure, T.; Shukuri, S.; Yugami, J.; Hasegawa, N.; Shinriki, H.; Goto, H.; Yamashita, H.; Takeda, E.

Book ID: 126597031
Publisher: IEEE
Year: 1992
Weight: 291 KB
Category: Article
ISBN-13: 9780780306981
DOI: 10.1109/VLSIT.1992.200618

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