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[IEEE 1992 Symposium on VLSI Technology Digest of Technical Papers - Seattle, WA, USA (2-4 June 1992)] 1992 Symposium on VLSI Technology Digest of Technical Papers - A high performance polysilicon TFT using RTA and plasma hydrogenation applicable to highly stable SRAMs of 16 Mbit and beyond

✍ Scribed by Hayashi, F.; Kitakata, M.

Book ID: 126629614
Publisher: IEEE
Year: 1992
Weight: 195 KB
Category: Article
ISBN-13: 9780780306981
DOI: 10.1109/VLSIT.1992.200634

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