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Hydrogenation effects on the structural and optical properties of Si+-implanted fused silica

✍ Scribed by Suk-Ho Choi; Jung Nam Kim; Hoon Young Cho


Publisher
Elsevier Science
Year
2001
Tongue
English
Weight
164 KB
Volume
1
Category
Article
ISSN
1567-1739

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Silicon capped by thermal oxide has been implanted with 1 β€’ 10 17 H/cm 2 and the implant profile peaking at the interface. Samples were subjected to thermal annealing and characterized by ERD, FTIR, RBS/channeling, UV/VIS reflectance and cathodoluminescence regarding H-content, crystalline quality a