Effect of thermal annealing on the optic
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A. Kling; J.C. Soares; A. RodrΓguez; T. RodrΓguez; M. Avella; J. JimΓ©nez
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Article
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2006
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Elsevier Science
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English
β 280 KB
Silicon capped by thermal oxide has been implanted with 1 β’ 10 17 H/cm 2 and the implant profile peaking at the interface. Samples were subjected to thermal annealing and characterized by ERD, FTIR, RBS/channeling, UV/VIS reflectance and cathodoluminescence regarding H-content, crystalline quality a