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Effect of thermal annealing on the optical properties of low-energy Cu-implanted silica glass

✍ Scribed by Jin-Xia Xu; Feng Ren; De-Jun Fu; Chang-Zhong Jiang


Publisher
Elsevier Science
Year
2006
Tongue
English
Weight
347 KB
Volume
373
Category
Article
ISSN
0921-4526

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Effect of thermal annealing on the optic
✍ A. Kling; J.C. Soares; A. RodrΓ­guez; T. RodrΓ­guez; M. Avella; J. JimΓ©nez πŸ“‚ Article πŸ“… 2006 πŸ› Elsevier Science 🌐 English βš– 280 KB

Silicon capped by thermal oxide has been implanted with 1 β€’ 10 17 H/cm 2 and the implant profile peaking at the interface. Samples were subjected to thermal annealing and characterized by ERD, FTIR, RBS/channeling, UV/VIS reflectance and cathodoluminescence regarding H-content, crystalline quality a