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Effect of annealing on the structural, optical and electrical properties of ITO films by RF sputtering under low vacuum level

✍ Scribed by T.S. Sathiaraj


Publisher
Elsevier Science
Year
2008
Tongue
English
Weight
583 KB
Volume
39
Category
Article
ISSN
0026-2692

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Effect of annealing temperature on the s
✍ Georgi P. Daniel; V.B. Justinvictor; Prabitha B. Nair; K. Joy; Peter Koshy; P.V. πŸ“‚ Article πŸ“… 2010 πŸ› Elsevier Science 🌐 English βš– 339 KB

ZnO thin films were deposited on corning glass substrates by RF magnetron sputtering at room temperature. The dependence of crystal structure, morphology and optical properties on postdeposition annealing was investigated using XRD, AFM and UV-vis Spectrophotometer. The asdeposited films were amorph