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Hydrogen implantation effect on optical properties of GaAs doping superlattices

✍ Scribed by H. W. Kunert; D. Dale; M. Hayes; J. Malherbe; V. K. Kononenko; J. Barnas


Publisher
John Wiley and Sons
Year
2003
Tongue
English
Weight
240 KB
Volume
38
Category
Article
ISSN
0232-1300

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## Abstract Amorphous hydrogenated silicon oxocarbonitride (SiCNO:H) films have been deposited by plasma‐assisted chemical vapour deposition (PACVD) using bis(trimethylsilyl)carbodiimide (BTSC) as a single source precursor in a argon (Ar) radio‐frequency plasma. In this work the SiCNO:H films depos